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This benchmarking tool can be used to compare the energy and water consumption characteristics of semiconductor manufacturing facilities, and thereby help identify potential energy and water cost savings opportunities.

Benchmarking can be done with a range of performance metrics,
from overall facility performance (e.g. BTU/sq. cm. wafer out) to system level efficiency (e.g. ventilation W/cfm).

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To benchmark your facility, follow these steps:

step one Log in with your ID and Password
step two Select your facility and year
step three
Enter facility data (e.g. facility type, climate zone, gross area), production data (e.g. total sq. cm. wafer outs), and energy and use data (e.g. annual electricity use). Although measured data is preferred, estimated data may also be provided.
step four Review your facility data
step five Benchmark your facility
step six See benchmarking results

Note: The data you provide will remain anonymous to other users of this system.

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